Fluid handling – Processes – Cleaning – repairing – or assembling
Patent
1993-08-19
1995-05-23
Nilson, Robert G.
Fluid handling
Processes
Cleaning, repairing, or assembling
137238, F16K 1736
Patent
active
054172365
ABSTRACT:
A process gas supply system at the gas supply point includes an automated means for evacuating gas in a process line fed by the process gas supply system when an abnormal event occurs. The process gas supply system of this invention eliminates the need for any special valves or piping at the point of use of the process gas as well as the need for a return line from the point of use to the process gas supply system to purge the process line. A process gas is contained in a cylinder under pressure. The cylinder is coupled to a process line by the process gas supply system. The process gas supply system includes a gas flow controller and an automatic evacuation system. The gas flow controller controls the supply of the process gas from the cylinder to the process line. In an abnormal event, process gas flow from the cylinder is blocked by the gas flow controller and the automatic evacuation system evacuates the process gas not only from the gas flow controller, but also from the process line.
REFERENCES:
patent: 4098284 (1978-07-01), Yamada
patent: 4832759 (1989-04-01), Diamond
patent: 4842844 (1989-06-01), Harris
patent: 4852600 (1989-08-01), Asbra et al.
Moore Gary M.
Pairish Richard S.
Gunnison Forrest E.
Hoffman Eric E.
Moore Epitaxial Inc.
Nilson Robert G.
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