Automated pattern inspection system

Details Automated pattern inspection system Automated pattern inspection system

1978-07-17

1979-05-22

Boudreau, Leo H.

Communications: electrical

Digital comparator systems

3401463H, 364564, G06K 900

Patent

active

041562313

ABSTRACT:
An automated pattern inspection system comprising first means for measuring an area value of an object digitized pattern, second means for computing a first square value of a boundary length from the area value, third means for detecting a boundary of the object digitized pattern, fourth means for computing a second square value of a length of the boundary detected by the third means, fifth means for computing a subtraction value between the first square value from the second means and the second square value from the fourth means, and sixth means for comparing the subtraction value from the fifth means with a reference level, whereby a condition of defect in the pattern is evaluated. According to this invention, any defect in an object pattern, regardless of its size, can be detected with a high speed operation, since this system does not require a square root extraction process.

REFERENCES:
patent: 3576980 (1971-05-01), Doyle
patent: 3757299 (1973-09-01), Perry
patent: 3980870 (1976-09-01), Kawahara
patent: 4097847 (1978-06-01), Forsen et al.

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