Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-03-31
2008-11-25
Bahta, Kidest (Department: 2123)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S097000
Reexamination Certificate
active
07457681
ABSTRACT:
The operation of a semiconductor fabrication facility may be automated to enable efficient assignments of lots to specific process tools or entities. This may involve the use of an algorithm which may have aspects which are common across various process areas within the fabrication facility. However, the algorithm may be customized to meet the needs of specific process areas.
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Concelman Joseph J.
Deng Yi
Henkel Zachary T.
Krishna Murali
Madson Robert A.
Bahta Kidest
Intel Corporation
Trop Pruner & Hu P.C.
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