Automated, modular approach to assigning semiconductor lots...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C700S097000

Reexamination Certificate

active

07457681

ABSTRACT:
The operation of a semiconductor fabrication facility may be automated to enable efficient assignments of lots to specific process tools or entities. This may involve the use of an algorithm which may have aspects which are common across various process areas within the fabrication facility. However, the algorithm may be customized to meet the needs of specific process areas.

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Pierce et al.; Value-Based Dispatching for Semiconductor Wafer Fabricatio, 2000 IEEE/SEMI advanced Semiconductor Manufacturing Conference, pp. 245-249.
Krishna et al., A Progerssive Strategy to Achieving Automated Lot Processing, 2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, pp. 1-5.
Shen et al., An Automatic monitor Management System For Effective 300mm Fab Operations, 2001 IEEE, pp. 99-102.

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