Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-02-07
2006-02-07
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S019000, C700S097000
Reexamination Certificate
active
06996450
ABSTRACT:
The present invention relates generally to an automated manufacturing system and method for manufacturing photomasks wherein information provided by a customer at a remote location is interfaced, via a network, to a photomask manufacturer's computer system and automatically processes data for manufacturing a photomask and automatically formats and routes data to processing equipment. The present invention reduces the need for manual intervention, thereby avoiding costly delays and transcription errors associated therewith. The software of the present invention provides for automatic generation of data arrays, which can be used to process and monitor the status of a photomask during manufacture. Further, the software is capable of automatically modifying design data provided by a photomask user. Additionally, the software of the present invention includes an automatic messaging system which can notify users of the system, of status and errors in manufacture of photomasks. The present invention also includes a real time monitoring system capable of notifying users of the status and errors in the processing of the photomask during manufacture.
REFERENCES:
patent: 3698072 (1972-10-01), Koens et al.
patent: 3900737 (1975-08-01), Collier et al.
patent: 4149246 (1979-04-01), Goldman
patent: 4875162 (1989-10-01), Ferriter et al.
patent: 5117354 (1992-05-01), Long et al.
patent: 5260866 (1993-11-01), Lisinki et al.
patent: 5416722 (1995-05-01), Edwards
patent: 5539975 (1996-07-01), Kukuljan et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5570291 (1996-10-01), Dudle et al.
patent: 5570292 (1996-10-01), Abraham et al.
patent: 5625801 (1997-04-01), Fukuya
patent: 5694551 (1997-12-01), Doyle et al.
patent: 5732218 (1998-03-01), Bland et al.
patent: 5825651 (1998-10-01), Gupta et al.
patent: 5844810 (1998-12-01), Douglas et al.
patent: 5870719 (1999-02-01), Maritzen
patent: 5870771 (1999-02-01), Oberg
patent: 5909570 (1999-06-01), Webber
patent: 5920846 (1999-07-01), Storch et al.
patent: 5933350 (1999-08-01), Fujimoto et al.
patent: 5950201 (1999-09-01), Van Huben et al.
patent: 5963953 (1999-10-01), Cram et al.
patent: 5969972 (1999-10-01), Kerszykowski et al.
patent: 5969973 (1999-10-01), Bourne et al.
patent: 6003012 (1999-12-01), Nick
patent: 6009406 (1999-12-01), Nick
patent: 6012070 (2000-01-01), Cheng et al.
patent: 6023565 (2000-02-01), Lawman et al.
patent: 6023699 (2000-02-01), Knoblock et al.
patent: 6212441 (2001-04-01), Hazama et al.
patent: 6324521 (2001-11-01), Shiota et al.
patent: 6330708 (2001-12-01), Parker et al.
patent: 6336056 (2002-01-01), Fujimoto et al.
patent: 6363358 (2002-03-01), Palmer et al.
patent: 6453345 (2002-09-01), Trcka et al.
patent: 6526545 (2003-02-01), Lin et al.
patent: 6587827 (2003-07-01), Hennig et al.
patent: 6615090 (2003-09-01), Blevins et al.
patent: 6615166 (2003-09-01), Guheen et al.
patent: 6622295 (2003-09-01), Schepp et al.
patent: 6725122 (2004-04-01), Mori et al.
patent: 6801823 (2004-10-01), Mori
patent: 2002/0013731 (2002-01-01), Bright et al.
patent: 2002/0013742 (2002-01-01), Shiota et al.
patent: 2002/0055878 (2002-05-01), Burton et al.
patent: 2002/0059122 (2002-05-01), Inoue et al.
patent: 2002/0062475 (2002-05-01), Iborra et al.
patent: 2002/0091991 (2002-07-01), Castro
patent: 2002/0143650 (2002-10-01), Matsuda
patent: 2002/0184266 (2002-12-01), Blessin
patent: 2003/0023336 (2003-01-01), Kreidler et al.
patent: 2003/0061587 (2003-03-01), Zhang et al.
patent: 2003/0177469 (2003-09-01), Suttile et al.
patent: 2004/0025137 (2004-02-01), Croke et al.
patent: 2004/0054633 (2004-03-01), Huyghe et al.
patent: 1 003 087 (2004-01-01), None
patent: WO 02/03141 (2002-01-01), None
Photronics, Screenshots from AlignRite System (9 sheets) see attached page “Description of AlignRite Screenshots”.
Photoplot Store, http://web.archive.org/web/20000614112553/http://www.photoplotstore.com/, Jun. 2000.
Peltier, J. et al., “Low Cost, Prototype ASIC and MCM Fabrication and Assembly from the MOSIS Service,” 1997 IEEE Proceedings, 1997, pp. 68-69.
Luo et al., “Desktop Rapid Prototyping System with Supervisory Control and Monitoring Through Internet,” IEEE/ASME Transactions on Mechatronics, vol. 6, No. 4, Dec. 2001, pp. 399-409.
Suttile et al., “Behind The Mask: Streamlining The Front-End Reticle Fabrication Process By Improving Mask Ordering,” MICRO Magazine, Jun. 2002, pp. 1-5.
Photronics, “Photronics eBeam Phase Masks: Tackling the Challenges of Special Lightwave Applications,” Photronics, vol. XIII. No. 1, Spring 2002.
Croke Charles
Jones Peter F.
Mills Edward Arthur
Morrison James P.
Spano Mary R.
Amster Rothstein & Ebenstein LLP
Kosowski Alexander
Photronics, Inc.
Picard Leo
LandOfFree
Automated manufacturing system and method for processing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Automated manufacturing system and method for processing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Automated manufacturing system and method for processing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3627407