Automated integrated circuit device manufacturing facility...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing

Reexamination Certificate

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C438S005000

Reexamination Certificate

active

11313196

ABSTRACT:
The present invention provides a method, an apparatus, and an automated semiconductor fabrication facility for determining control information based on global goals of a semiconductor manufacturing facility. The method includes accessing information indicative of at least one global goal of a semiconductor manufacturing facility, determining control information based on the at least one global goal, and providing a portion of the control information to each of a plurality of control units. Each of the plurality of control units is configured to control a corresponding manufacturing activity based on the provided portion of the control information.

REFERENCES:
patent: 4888692 (1989-12-01), Gupta et al.
patent: 5344365 (1994-09-01), Scott et al.
patent: 6112126 (2000-08-01), Hales et al.
patent: 6197604 (2001-03-01), Miller et al.
patent: 6243612 (2001-06-01), Rippenhagen et al.
patent: 6763277 (2004-07-01), Allen et al.
patent: 6988225 (2006-01-01), Purdy et al.
patent: 2002/0082738 (2002-06-01), Goldman et al.
patent: 2003/0180972 (2003-09-01), Al-Bayati et al.
patent: 2005/0283498 (2005-12-01), Kuo et al.
patent: 2006/0081973 (2006-04-01), Koo et al.
Valckenares et al., “Towards a Novel Manufacturing Control Principle”, 1999, Preceedings of te Second intrnational workshop.
Funk et al., “Effective Implementation of APC”, Jul. 1, 2002, Semiconductor International.

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