Automated guided vehicle

Details Automated guided vehicle Automated guided vehicle

2006-12-26

2006-12-26

Matecki, Kathy (Department: 3652)

Material or article handling

Device for emptying portable receptacle

Nongravity type

Reexamination Certificate

active

07153079

ABSTRACT:
In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member.The pressing member55can transfer between a “pressing” position which contacts against the edge of the wafer10to press the wafer10, and a “receding” position which is located away from the edge of the wafer10. A transferring direction A of the pressing member55of a moment in which the pressing member55contacts against the edge of the wafer10when the pressing member55transfers from the “receding” position to the “pressing” position, is approximately perpendicular to an outline of the part of the wafer10contacted against the pressing member55.

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