Automated electrical resistivity measuring apparatus for semicon

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324 62, 324 64, 324158F, G01R 2702, G01R 2708

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active

039477657

ABSTRACT:
A semiconductor crystal resistivity measuring station comprised of an enclosed automatically operated probe apparatus electrically connected to a remotely controlled power supply and an electronic computer for automatically executing precise electrical resistivity measurements, in consecutive increments along a single crystal length.

REFERENCES:
patent: 2586125 (1952-02-01), Van Blarcom
patent: 2802172 (1957-08-01), Mueller et al.
patent: 3312893 (1967-04-01), Currin et al.

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