Data processing: structural design – modeling – simulation – and em – Simulating electronic device or electrical system
Reexamination Certificate
2002-11-21
2008-11-25
Rodriguez, Paul L (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating electronic device or electrical system
C716S030000, C716S030000, C438S007000, C438S014000, C700S121000
Reexamination Certificate
active
07457736
ABSTRACT:
An automated metrology recipe set up process is described for a manufacturing process, in which patterns to be formed on a device are defined using a design database. The design database is processed to produce a simulated image of a feature for use in a metrology tool for a measurement of the feature. The simulated image is supplied to the metrology tool, where it is used as a basis for alignment of the tool for the measurement. Other recipe data is combined with the simulated image to provide a fully automated metrology set up process.
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Jason Groce, Advanced Process Control Framework Initiative (APCFI) Project: Overview, SeMatech International Jun. 30, 1999 consisting of 25 pages.
Haynes Beffel & Wolfeld LLP
Louis Andre Pierre
Rodriguez Paul L
Suzue Kenta
Synopsys Inc.
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