Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-01-01
2008-01-01
Von Buhr, M. N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
Reexamination Certificate
active
07315765
ABSTRACT:
A method, apparatus, and a system for determining a control thread based upon a process result are provided. At least one post-process parameter is received. The post parameter relates to a first workpiece upon which a plurality of processes have been performed by a plurality of processing tools. A combination of at least a portion of the plurality of processing tools is selected based upon the post-process parameter.
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Kadosh Daniel
Ranft Alan Grosvenor
Advanced Micro Devices , Inc.
Buhr M. N. Von
Williams Morgan & Amerson P.C.
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