Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1980-05-22
1982-04-13
Karlsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 60R, 324158T, 324158D, G01R 3126, G01R 2726
Patent
active
043250254
ABSTRACT:
An apparatus for measuring the surface potential and impurity concentration in a semi-conductor body by monitoring the current flowing in a semiconductor body when the body is biased with a ramp voltage above its flat band voltage and summing the monitored current with the ramp voltage biasing the body. The apparatus provides direct measurement of surface potential and impurity concentration in a semiconductor structure and is especially useful in metal insulator semiconductor (MIS) structures.
REFERENCES:
patent: 3995216 (1976-11-01), Yun
Ziegler et al., "Determination of . . . ", Solid State Electronics, 1975, vol. 18, pp. 189-198.
Corcoran Richard A.
Keenan William A.
Michaelides Demetrios
Yun Bob H.
International Business Machines - Corporation
Karlsen Ernest F.
Thornton Francis J.
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