Automated analysis system for semiconductor manufacturing...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation

Reexamination Certificate

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Reexamination Certificate

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07548824

ABSTRACT:
A system and method for an automated analysis system for semiconductor manufacturing fabrication is disclosed. The system includes one or more site databases that each store data generated by an associated one or more semiconductor fabrication plants, a configuration database, and a server communicatively coupled to the one or more site databases and the configuration database, the server to analyze the data from the one or more site databases upon a request by a client, the data to be analyzed based on configuration settings in the configuration database that provide uniform configuration synchronization for applying algorithms to the data.

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patent: 2007/0168461 (2007-07-01), Moore
patent: 2008/0301666 (2008-12-01), Gordon et al.

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