Autofocusing system for a projecting exposure apparatus

Details Autofocusing system for a projecting exposure apparatus Autofocusing system for a projecting exposure apparatus

1989-10-17

1990-08-28

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 53, 355 55, 355 77, G03B 2752, G03B 2770, G03B 2732

Patent

active

049529706

ABSTRACT:
An autofocusing system, usable with a projection optical system for projecting a pattern of a first object upon a second object, for positioning the surface of the second object with respect to an imaging plane of the projection optical system is disclosed, wherein the surface of the second object is illuminated; wherein an image of the second object is formed on a predetermined plane by use of the projection optical system; and wherein the interval between the imaging plane of the projection optical system and the surface of the second object with respect to the direction of an optical axis of the projection optical system is adjusted on the basis of the state of the image of the second object formed on the predetermined plane, such that the surface of the second object can be positioned on the imaging plane of the projection optical system.

REFERENCES:
patent: 4127777 (1978-11-01), Binder
patent: 4395117 (1983-07-01), Suzuki
patent: 4441250 (1984-04-01), Imahasi
patent: 4615614 (1986-10-01), Sugiyama
patent: 4657379 (1987-04-01), Suwa
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4668077 (1987-05-01), Tanaka
patent: 4687322 (1987-08-01), Tanimoto et al.
patent: 4801977 (1989-01-01), Ishizaka et al.
patent: 4814829 (1989-03-01), Kosugi et al.
patent: 4829193 (1989-05-01), Nishi

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