Autofocusing device and projection exposure apparatus with the s

Details Autofocusing device and projection exposure apparatus with the s Autofocusing device and projection exposure apparatus with the s

1993-01-29

1994-11-01

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 43, 355 57, 355 77, G03B 2742

Patent

active

053611225

ABSTRACT:
A focusing method is disclosed wherein a substrate is moved substantially along a focal plane of a projection optical system up to a predetermined station adjacent to the focal plane of the projection optical system and then, at the predetermined station, the surface of the substrate is brought into substantial coincidence with the focal plane of the projection optical system. The method includes the steps of detecting a deviation of the surface of the substrate with respect to the focal plane of the projection optical system, before the substrate, being moved substantially along the focal plane of the projection optical system, is moved up to the predetermined station; and substantially correcting the deviation on the basis of the detection.

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