Autofocus system for scanning laser inspector or writer

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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356 4, G01J 120, G01C 308

Patent

active

048869589

ABSTRACT:
A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. An autofocus keeps the scanning laser beam in focus on the target. The autofocus system includes an objective lens assembly through which a first laser beam is directed onto a writing surface, an autofocus laser which is detected by a photodetector after it is reflected from the surface of a target, and a linear magnetic motor for moving a lens in the objective lens assembly to keep the first laser beam focused on the writing surface.

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