Autofocus system and method for autofocusing an optical...

Details Autofocus system and method for autofocusing an optical... Autofocus system and method for autofocusing an optical...

2007-05-11

2009-12-01

Luu, Thanh X (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

C250S201400

Reexamination Certificate

active

07626151

ABSTRACT:
The invention relates to an autofocus system for an optical instrument (1) that images a specimen (11), having an irradiation optical system (7) for generating an irradiation beam path that generates an autofocus pattern on the specimen (11), the irradiation beam path being directed onto the specimen by means of a deflection element (10), and having an autofocus analysis unit (19) to which is conveyed, by means of a deflection element (15), a detector beam path that encompasses radiation, reflected from the specimen (11), of the irradiation beam path, a micromirror array (20) having individually controllable and adjustable micromirrors being provided in combined fashion as a deflection element (10) for the irradiation beam path and as a deflection element (15) for the detector beam path.

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