Autocollimator with grating

Details Autocollimator with grating Autocollimator with grating

1997-07-08

1999-11-30

Font, Frank G.

Optics: measuring and testing

Angle measuring or angular axial alignment

Alignment of axes nominally coaxial

G01B 1126

Patent

active

059952156

ABSTRACT:
An optical crossed grating is used to calibrate a conventional autocollimator operated with a single-frequency light source. Since a collimated monochromatic beam is diffracted at a number of well known angles after being reflected from the grating, an array of spots is formed on the detector surface that makes it possible to calibrate the autocollimator in a single operation. Because the angle of the diffracted light is determined only by the spacing in the grid, the calibration accuracy is insensitive to temperature variations and to the position of the grid on the sample stage. The calibration scaling values are calculated simply by measuring the spot spacings on the detector surface in relation to the diffraction angles corresponding to the grid spacing.

REFERENCES:
patent: 3730610 (1973-05-01), Lissberger
patent: 4500200 (1985-02-01), Kleinhans
patent: 5110210 (1992-05-01), Fay et al.
patent: 5513000 (1996-04-01), Smith et al.
Eugene Hecht, "Optics," Addison-Wesley Publishing Company, Second Edition, pp. 79-81 and Chapter 10.

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