Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1991-10-08
1994-01-04
Noland, Tom
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
200 83SA, 307116, G01L 2700, H01H 3500, H01H 3524
Patent
active
052750353
ABSTRACT:
A trip controller for a wafer processing system provides for adjustable hysteresis and autocalibration. Adjustable hysteresis implements different trip points for upward pressure changes and downward pressure changes in the wafer processing chamber. Autocalibration is implemented using a digital potentiometer with on-chip storage. The trip controller provides more reliable operation than conventional single trip-point indicators. Yet, the inventive trip controller is readily inserted as a replacement in systems formerly using conventional trip controllers. Further advantages include a single-rail power supply and flexibility to adapt to different systems requiring trip controllers.
REFERENCES:
patent: 3585841 (1971-06-01), Brandau et al.
patent: 3657926 (1972-04-01), Munson et al.
patent: 3974472 (1976-08-01), Gould, Jr.
patent: 4047421 (1977-09-01), Spiers et al.
patent: 4228511 (1980-10-01), Simcoe et al.
patent: 4263803 (1981-04-01), Burkhardt
patent: 4619135 (1986-10-01), Nunn
patent: 4672974 (1987-06-01), Lee
Anderson Clifton L.
Noland Tom
VLSI Technology Inc.
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