Auto-teaching method in semiconductor processing system

Details Auto-teaching method in semiconductor processing system Auto-teaching method in semiconductor processing system

1998-02-12

1999-11-09

Westin, Edward P.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

901 47, 901 3, 414172, G01B 1100, H01L 2168

Patent

active

059819669

ABSTRACT:
A detecting apparatus for performing an auto-teaching operation is used in a vertical heat treatment system to cause a controller for controlling movement of a wafer transfer arm to learn a unit of positional information about a wafer boat placed on a transfer station. The detecting apparatus has a base frame having a shape similar to a wafer and detachably mounted on a wafer holding place of the boat. On the base frame are a Z-sensor formed of an optical sensor of a reflection type, a pair of .theta.-sensors, and an X-sensor. The auto-teaching operation is performed by observing the transfer arm by the detecting apparatus while the detecting apparatus is placed on the wafer holding place of the boat.

REFERENCES:
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4986729 (1991-01-01), Ohlenbusch
patent: 5044752 (1991-09-01), Thurfjell et al.
patent: 5783834 (1998-07-01), Shatas

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