Auto reactance compensated non-contacting resistivity measuring

Details Auto reactance compensated non-contacting resistivity measuring Auto reactance compensated non-contacting resistivity measuring

1988-08-03

1990-05-01

Eisenopf, Reinhard J.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324691, 324714, G01R 2726

Patent

active

049221825

ABSTRACT:
A device for measuring the resistivity of a conductive layer buried beneath an outer layer. The device is capacitively coupled to the buried layer by a driven electrode and a pickup electrode. An adjustable frequency source resonates the two electrodes with an inductor so that an attached meter measures the resistivity of only the buried layer.

REFERENCES:
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patent: 4446424 (1984-05-01), Chatanier et al.
patent: 4797614 (1989-01-01), Nelson
Abstract, "Sheet Resistance Measurement of Buried Shielding Layers", B. A. Unger et al., EOS/ESD Symposium Proceedings, 1986, pp. 59-61.

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