Electricity: motive power systems – Linear-movement motors
Reexamination Certificate
2006-04-25
2006-04-25
Schuberg, Darren (Department: 2834)
Electricity: motive power systems
Linear-movement motors
C310S012060, C250S491100, C355S072000
Reexamination Certificate
active
07034474
ABSTRACT:
A stage assembly (220) for moving a device (200) includes a stage (208), an attraction-only type actuator pair (426) that moves the stage (208), and a control system (24). In one embodiment, the actuator pair (426) includes a first electromagnet (436F), a first conductor (438F) and a first target (440F) having a first target surface (442F). The actuator pair also includes a second electromagnet (436S), a second conductor (438S) and a second target (440S) having a second target surface (442S). The first electromagnet (436F) is positioned at a first angle θ1relative to a first target surface (442F) and the second electromagnet (436S) is positioned at a second angle θ2relative to the second target surface (442S). The control system (24) directs a first current to one or more of the electromagnets based on at least one of the angles θ1, θ2. Further, one or more electromagnets (436) can include a first measurement point and a second measurement point. The control system (24) can direct current to the actuator pair (426) based on the relative distance between the first and second measurement points and the corresponding target surface (442).
REFERENCES:
patent: 6281655 (2001-08-01), Poon et al.
patent: 6486941 (2002-11-01), Hazelton et al.
Hirano Kazuhiro
Teng Tim
Yang Pai Hsueh
Yuan Bausan
Jones Judson H.
Nikon Corporation
Roeder Steven G.
Rose Jim
Schuberg Darren
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