Auto-alignment system with focused light beam

Details Auto-alignment system with focused light beam Auto-alignment system with focused light beam

2005-07-05

2005-07-05

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S227110, C250S201200, C324S1540PB

Reexamination Certificate

active

06914237

ABSTRACT:
Characterizing the surface responsivity of a photo-detector includes focusing a light beam on the photo-detector surface and measuring a response of the photo-detector. The focused light beam is scanned across the surface of the photo-detector. The response of the photo-detector at each position may be recorded to allow the responsivity of the photo-detector surface to be characterized.

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Hickman II et al., “Uniformity and Peformance Characterization of GaN P-I-N Photodetectors Fabricated From 3-Inch Epitaxy,” MRS Internet J. Semicond. Res. 4SI, G7.6 (1999).

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