Auger spectroscopic technique measuring the number of electrons

Details Auger spectroscopic technique measuring the number of electrons Auger spectroscopic technique measuring the number of electrons

1982-05-06

1984-07-10

Anderson, Bruce C.

Radiant energy

Electron energy analysis

H01J 4000, H01J 4700

Patent

active

044594828

ABSTRACT:
An improved technique in Auger electron spectroscopy which uses a standard detector which emits a voltage signal proportional to the number of electrons emitted from a surface of material under investigation at a particular energy level to which the detector is set. An improvement is in the manner of processing this voltage signal in order to ascertain the desired reading of number of electrons. The processing circuitry is electrically isolated from the rest of the system but is directly coupled to the detector. A baseline voltage signal is established at a lower edge of electron energy range of interest and that range has been scanned to determine the difference between detector signal output and the baseline output. The result is a faster and more accurate determination of detector voltage signal outputs over the region which can then better be used to determine the characteristics of the surface from which the electrons are being emitted.

REFERENCES:
patent: 3461306 (1969-08-01), Stout et al.
patent: 3914606 (1975-10-01), Hashimoto et al.
patent: 4145743 (1979-03-01), Di Ciurcio
"Toward Optimum Utilization of the Cylindrical Mirror Analyzer in Auger Electron Spectroscopy", Pocker, Rev. Sci Ins., vol. 46, No. 1, Jan. 1975, pp. 10-106.
"Digital Data Acquisition and Processing in an Auger Electron Spectrometer", Strausser, Applied Surface Anal., 1980, pp. 158-181.
"Linearized secondary-electron cascades from the surfaces of metals, I, Clean surfaces of homogeneous specimens", Sickafus, Physical Review B, vol. 16, No. 4, 8-77, pp. 1436-1447.

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