Auger spectrometry

Details Auger spectrometry Auger spectrometry

1989-04-27

1991-03-26

Berman, Jack I.

Radiant energy

Electron energy analysis

250311, 250396R, 250396ML, H01J 37145

Patent

active

050031724

ABSTRACT:
An objective lens in an electron microscope is adapted to detection of Auger electrons. Using an additional lens field, preferably including the use of a VAIL lens, the electrons to be detected are spiraled to a selection space. Between the lens field and the selection space a preferably displaceable, magnetic diaphragm is arranged for the separation of lens fields.

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patent: 4714833 (1987-12-01), Rose et al.
patent: 4810879 (1989-03-01), Walker
patent: 4812652 (1989-03-01), Egle et al.
patent: 4818872 (1989-04-01), Parker et al.

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