Auger microlithography

Details Auger microlithography Auger microlithography

1980-07-23

1982-09-21

Schilling, Richard

Radiation imagery chemistry: process, composition, or product th

Silver halide colloid tanning process, composition, or product

430317, 430323, 430967, 2504921, 2504922, G03C 500, G03C 504, G21G 500

Patent

active

043507557

ABSTRACT:
Relatively monochromatic soft X-rays at 4.5 m.mu. is used to induce auger electrons from the silver-halide crystal to sensitize the photosensitive grain, and the exposed crystal is developed into a fine silver grain. The pattern of the silver grains with sizes of about 0.02.mu. can be used as a photoresist with a resolution of about 0.1.mu.. The silver grains can also be used to initiate certain organic compounds for the resist, also with a resolution of the order of 0.1.mu..

REFERENCES:
patent: 3960560 (1976-06-01), Sato
patent: 3963497 (1976-06-01), Kosti
patent: 3966473 (1976-06-01), Sato
patent: 4056395 (1977-11-01), Sato et al.
patent: 4113486 (1978-09-01), Sato
patent: 4119855 (1978-10-01), Bernacki
patent: 4177071 (1979-12-01), Brabandere et al.
patent: 4246328 (1981-01-01), Sata et al.
patent: 4260670 (1981-04-01), Burns

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