Auger electron spectroscopy

Radiant energy – Electron energy analysis

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250310, H01J 3900

Patent

active

042052262

ABSTRACT:
An instrument utilizing the Auger effect and including a cylindrical mirror analyzer with magnetic lenses and an off-axis annular-aperture collector apparatus arranged in a unique configuration.

REFERENCES:
patent: 3102194 (1963-08-01), Broek et al.
patent: 3774042 (1973-11-01), Engel
patent: 3845305 (1974-10-01), Liebl
patent: 3920990 (1975-11-01), Nieuwland et al.
patent: 4048498 (1977-09-01), Gerlach et al.
patent: 4100409 (1978-07-01), Brongersma
patent: 4107526 (1978-08-01), McKinney et al.

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