Attraction holding device

Details Attraction holding device Attraction holding device

1984-12-31

1986-07-01

Watson, Robert C.

Work holders

With fluid means

Vacuum-type holding means

269 22, B25B 1100

Patent

active

045975698

ABSTRACT:
A device for attraction holding a measurement object in an interferometer comprises a holding surface having holes and an air chamber communicating with the holes through suction passages formed between the holding surface and air chamber so as to attract and hold an object on the holding surface by exhausting the air from the air chamber. The air chamber is sealed by at least one flexible member which is deformed when an excessive negative pressure is established in the air chamber, so as to prevent distort or deformation of the holding surface, and hence the object held thereon.

REFERENCES:
patent: 477304 (1892-06-01), Marsh
patent: 1823537 (1931-09-01), Gavdreau
patent: 3851758 (1974-12-01), Makhijani et al.
patent: 3971552 (1976-07-01), Mayfield
patent: 4428815 (1984-01-01), Powell et al.
patent: 4541717 (1985-09-01), Itamoto et al.

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