Attraction holding device

Details Attraction holding device Attraction holding device

1983-12-08

1985-09-17

Thomas, Alexander S.

Optics: measuring and testing

Sample, specimen, or standard holder or support

356359, 356360, G01N 2146, G01B 902

Patent

active

045417172

ABSTRACT:
A device for holding a measurement object e.g. in interferometers comprises a base plate and an attraction plate mounted on the base plate so as to attract the object placed on an upper surface of the attraction plate to the base plate together with the attraction plate by a vacuum applied via attraction grooves formed on the base plate and attraction passages perforated through the attraction plate. The upper surface of the base plate is formed as a reflection plane, and the attraction plate is made of a transparent material, so that Newton's rings generated by light reflected from the upper surface of the base plate and light reflected from the lower surface of the attraction plate can be observed from above the attraction plate.

REFERENCES:
patent: 4089607 (1978-05-01), Rambauske
patent: 4145140 (1979-03-01), Fujii
patent: 4304464 (1981-12-01), Hill et al.
patent: 4347441 (1982-08-01), Dil et al.
patent: 4387994 (1983-06-01), Balasubramanian

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