Attracting plate of an electrostatic chuck for semiconductor...

Details Attracting plate of an electrostatic chuck for semiconductor... Attracting plate of an electrostatic chuck for semiconductor...

2007-02-01

2009-02-24

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0587222

CLAIM:
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.

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