Attracting plate of an electrostatic chuck for semiconductor...

Details Attracting plate of an electrostatic chuck for semiconductor... Attracting plate of an electrostatic chuck for semiconductor...

2008-06-03

2008-06-03

Sikder, Selina (Department: 2912)

Equipment for production, distribution, or transformation of ene

Distribution, modification or control

Semiconductor, transistor or integrated circuit

Design Patent

active

D0570310

CLAIM:
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.

REFERENCES:
patent: 5671116 (1997-09-01), Husain
patent: 6278600 (2001-08-01), Shamouilian et al.
patent: D546784 (2007-07-01), Hayashi
patent: D548200 (2007-08-01), Hayashi
patent: D548705 (2007-08-01), Hayashi
patent: 2004/0212947 (2004-10-01), Nguyen et al.
patent: 2005/0252447 (2005-11-01), Zhao et al.
patent: 2006/0002053 (2006-01-01), Brown et al.
patent: 2006/0221539 (2006-10-01), Morita et al.

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