Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent
2007-08-14
2007-08-14
Sikder, Selina (Department: 2912)
Equipment for production, distribution, or transformation of ene
Distribution, modification or control
Semiconductor, transistor or integrated circuit
Design Patent
active
29245047
CLAIM:
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.
REFERENCES:
patent: 3078565 (1963-02-01), Sanders
patent: 4502094 (1985-02-01), Lewin et al.
patent: 5350479 (1994-09-01), Collins et al.
patent: 5671116 (1997-09-01), Husain
patent: 6033478 (2000-03-01), Kholodenko
patent: 6278600 (2001-08-01), Shamouilian et al.
patent: 6628503 (2003-09-01), Sogard
patent: 6721162 (2004-04-01), Weldon et al.
patent: 2002/0027762 (2002-03-01), Yamaguchi
patent: 2002/0159217 (2002-10-01), Tsuruta et al.
patent: 2004/0179323 (2004-09-01), Litman et al.
patent: 2004/0190215 (2004-09-01), Weldon et al.
patent: 2004/0212947 (2004-10-01), Nguyen et al.
patent: 2004/0218339 (2004-11-01), Nakamura
patent: 2005/0111161 (2005-05-01), Tran
patent: 2006/0002053 (2006-01-01), Brown et al.
patent: 2006/0161785 (2006-07-01), Pellegrin
patent: 2006/0221539 (2006-10-01), Morita et al.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Sikder Selina
Tokyo Electron Limited
LandOfFree
Attracting disc for an electrostatic chuck for semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Attracting disc for an electrostatic chuck for semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Attracting disc for an electrostatic chuck for semiconductor... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3828198