Equipment for production – distribution – or transformation of ene – Distribution – modification or control – Semiconductor – transistor or integrated circuit
Design Patent
2007-07-17
2007-07-17
Sikder, Selina (Department: 2912)
Equipment for production, distribution, or transformation of ene
Distribution, modification or control
Semiconductor, transistor or integrated circuit
Design Patent
active
29245021
CLAIM:
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.
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Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Sikder Selina
Tokyo Electron Limited
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