Attitude control device and precision machining apparatus

Abrading – Precision device or process - or with condition responsive... – With feeding of tool or work holder

Reexamination Certificate

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Details

C451S331000, C451S392000

Reexamination Certificate

active

11316906

ABSTRACT:
An attitude control device and a precision machining apparatus capable of accurately controlling the attitude of an object mounted on the attitude control device according to grinding stages. The attitude control device is constituted by a first flat-plate member21and a second flat-plate member22disposed in parallel with the first flat-plate while being spaced apart from the same by a distance L. A spherical member3is interposed between the first and second flat-plate members21, 22while fitting its portions in recesses21a,22arespectively formed in the first and second flat-plate members21, 22.A first actuator4aexpandable in a Z-axis direction perpendicular to a plane defined by an X-axis and a Y-axis is interposed between the flat-plate members. Second actuators4b,4bexpandable in a suitable direction in the plane defined by the X-axis and the Y-axis are connected to the second flat-plate member22.The second flat-plate member22is movable relative to the first flat-plate member while being in an attitude with an object mounted thereon. The spherical member3is bonded to the first and second flat-plate members21, 22by an adhesive6elastically deformable.

REFERENCES:
patent: 2002/0188370 (2002-12-01), Saldana et al.
patent: 2006/0000378 (2006-01-01), Kubo
patent: 2006/0009125 (2006-01-01), Okura
patent: 1 034 885 (2000-09-01), None
patent: 2000-141207 (2000-05-01), None
patent: 2001-265441 (2001-09-01), None
patent: 2001-328065 (2001-11-01), None
patent: 2002-127003 (2002-05-01), None
EPO Search Report for Appln. No. 05257937.2-2302; dated Apr. 4, 2006; 3 pages.

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