Attaching a pellicle frame to a reticle

Details Attaching a pellicle frame to a reticle Attaching a pellicle frame to a reticle

2007-09-04

2007-09-04

Chen, Vivian (Department: 1773)

Stock material or miscellaneous articles

Display in frame or transparent casing; or diorama including...

Peripheral enclosure or frame

C428S034000, C428S212000, C156S306600, C156S308200, C156S308400, C156S313000, C156S324400, C156S327000, C430S005000, C355S030000, C355S053000, C355S075000

Reexamination Certificate

active

10649354

ABSTRACT:
A pellicle membrane is mounted between an outer frame and an inner frame. At least one of the frames is attached to the reticle without using conventional adhesives. The pellicle and reticle may be used in a lithography system. The pellicle allows radiation to pass through the pellicle to the reticle and may prevent particles from passing through the pellicle.

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