Atomizing nozzle and filter and spray generating device

Details Atomizing nozzle and filter and spray generating device Atomizing nozzle and filter and spray generating device

1999-05-03

1999-12-28

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

216 2, H01L 2100

Patent

active

060076763

ABSTRACT:
A nozzle assembly for use in atomizing and generating sprays from a fluid. The nozzle assembly includes two members, each with generally planar surfaces, that are joined together. A first set of channels is formed in the generally planar surface of a first one of the members to form, in cooperation with the generally planar surface of the second of the members, a plurality of filter passageways. A plenum chamber is formed in the first member. The plenum chamber is in fluid communication with and downstream of the plurality of filter passageways. A second set of channels is formed in the generally planar surface of the first member to form, in cooperation with the generally planar surface of the second member, a plurality of nozzle outlet passageways. These nozzle outlet passageways are in fluid communication with the plenum chamber. The nozzle outlet passageways include a plurality of nozzle outlets which are adapted to discharge a plurality of fluid jets that impinge on one another to thereby atomize a flow of fluid.

REFERENCES:
patent: 3347473 (1967-10-01), Steck
patent: 3397278 (1968-08-01), Pomerantz
patent: 3615054 (1971-10-01), La Botz
patent: 3921916 (1975-11-01), Bassous
patent: 4151955 (1979-05-01), Stouffer
patent: 4688056 (1987-08-01), Noguchi et al.
patent: 4828184 (1989-05-01), Gardner et al.
patent: 4915718 (1990-04-01), Desai
patent: 5160403 (1992-11-01), Fisher et al.
patent: 5332466 (1994-07-01), Nozawa
patent: 5334247 (1994-08-01), Columbus et al.
patent: 5487378 (1996-01-01), Robertson et al.
patent: 5587128 (1996-12-01), Wilding et al.
patent: 5855801 (1999-01-01), Lin et al.
Patent Abstracts of Japan, vol. 005, No. 183, Nov. 21, 1981.
Patent Abstracts of Japan, vol. 005, No. 194, Dec. 10, 1981.
Patent Abstracts of Japan, vol. 007, No. 029, Feb. 05, 1983.
Silicon Micromechanical Devices:, Scientific American, Apr. 1983, James B. Angell, Stephen C. Terry and Phillip W. Barth, pp. 36-47.
Article by Kurt Peterson entitled Silicon as a Mechanical Material, published in proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-456.

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