Atomic wire and atomic wire switch

Details Atomic wire and atomic wire switch Atomic wire and atomic wire switch

2000-03-09

2000-11-28

Hardy, David

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

438962, 257 9, H01L 2120

Patent

active

061535001

ABSTRACT:
A fine wire is fabricated by supplying metal atoms to one row or a plurality of rows formed by extraction of terminated atoms or molecules to the surface of substance made non-conductive by terminating all dangling bonds on the surface thereof with atoms or molecules. The conductivity of the fine wire can be attained by supplying metal atoms larger in number to that required for just terminating dangling bonds formed by extraction of terminated atoms or molecules.

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Shen et al., Atomic-Scale Desorption Through Electronic and Vibrational Excitation Mechanisms, Science, 268, Jun. 16, 1995, pp. 1590-1592.
Watanabe et al., "Electronic Structure of an Atomic Wire on a Hydrogen-Terminated Si(111) Surface First-Principles Study", Physical Review B, 52(15), 768-771.
Shen et al., "Nanoscale Oxide Patterns on Si(100) Syrafaces", Appl. Phys, Lett., 66(8), Feb. 20, 1995.

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