Atomic probe microscope

Details Atomic probe microscope Atomic probe microscope

1991-07-01

1993-09-21

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 356376, G01B 734, G01B 1130

Patent

active

052458636

ABSTRACT:
A cantilever has a probe on one side of the end portion and a mirror on the opposite side. The cantilever is fixed to a support member via a piezoelectric element. A semiconductor laser situated above the mirror has a reflection cleavage plane and constitutes a Fabry-Perot resonator between the mirror and the reflection cleavage plane. The output from the resonator varies in accordance with the amount of displacement of the end portion of the cantilever, that is, the surface configuration of the sample. This variation is detected by a detector via a photodetector. A control circuit controls a driving voltage applied to an XYZ-scanner so as to cancel the variation of the output from the resonator, thereby keeping constant the distance between the tip of the probe and the surface of the sample. The driving voltage provides height data of the sample surface. The driving voltage, along with a position signal relating to the sample surface output from the XYZ-scanner, is supplied to an image forming unit. The image forming unit generates a three-dimensional image representing the surface configuration of the sample, on the basis of the input voltage and signal.

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Physical Review Letters, vol. 56, No. 9, Mar. 3, 1986, Atomic Force Microscope, G. Binnig et al., pp. 930-933.
Physical Review Letters, vol. 49, No. 1, Jul. 5, 1982, Surface Studies by Scanning Tunneling Microscope, G. Binning et al., pp. 57-61.
Proceedings of the IEEE, vol. 70, No. 5, May, 1982, Silicon as a Mechanical Material, Kurt E. Petersen, pp. 420-457.
Applied Optics/vol. 29, No. 1, Jan. 1, 1990--pp. 16-18 "Fiber optic displacement sensor with subangstrom resolution"; S. Breen et al.
Applied Optics/vol. 28, No. 20, Oct. 15, 1989--pp. 4251 & 4487 "NASA Patter"; Charles Braun.

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