Atomic force microscopy

Details Atomic force microscopy Atomic force microscopy

1990-09-27

1992-09-08

Noland, Tom

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 356376, G01B 1130

Patent

active

051448335

ABSTRACT:
An atomic force microscope includes a tip mounted on a micromachined cantilever. As the tip scans a surface to be investigated, interatomic forces between the tip and the surface induce displacement of the tip. A laser beam is transmitted to and reflected from the cantilever for measuring the cantilever orientation. In a preferred embodiment the laser beam has an elliptical shape. The reflected laser beam is detected with a position-sensitive detector, preferably a bicell. The output of the bicell is provided to a computer for processing of the data for providing a topographical image of the surface with atomic resolution.

REFERENCES:
patent: Re33387 (1990-10-01), Binnig
patent: 1976337 (1934-10-01), Firestone et al.
patent: 2048154 (1936-07-01), Abbott et al.
patent: 2171433 (1939-08-01), Powers
patent: 2205517 (1940-06-01), Devol
patent: 2686101 (1954-08-01), Davis
patent: 3251135 (1966-05-01), Reason
patent: 3335367 (1967-08-01), Skoglund et al.
patent: 3571579 (1971-03-01), Whitehouse et al.
patent: 3617131 (1971-07-01), Taguchi
patent: 3798449 (1974-03-01), Reinheimer et al.
patent: 4267732 (1981-05-01), Quate
patent: 4596925 (1986-06-01), Gilby
patent: 4659219 (1987-04-01), de Fleurieu et al.
patent: 4711578 (1987-12-01), Chaimowicz
patent: 4724318 (1988-02-01), Binnig
patent: 4739161 (1988-04-01), Moriyama et al.
patent: 4745270 (1988-05-01), Horikawa et al.
patent: 4762996 (1988-08-01), Binnig et al.
patent: 4770533 (1988-09-01), Suwa
patent: 4782239 (1988-11-01), Kawaguchi et al.
patent: 4800274 (1989-01-01), Hansma et al.
patent: 4806755 (1989-02-01), Duerig et al.
patent: 4823004 (1989-04-01), Kaiser et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4851671 (1989-07-01), Pohl
patent: 4861990 (1989-08-01), Coley
patent: 4878114 (1989-10-01), Huynh et al.
patent: 4883959 (1989-11-01), Hosoki et al.
patent: 4889988 (1989-12-01), Elings et al.
patent: 4894537 (1990-01-01), Blackford et al.
patent: 4896044 (1990-01-01), Li et al.
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4992728 (1991-02-01), McCord et al.
patent: 5003815 (1991-04-01), Martin et al.
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5051379 (1991-09-01), Bayer et al.
D. Ruger et al., "Improved Fiber-Optic Interferometer for Atomic Force Microscopy", Applied Physics Letters, vol. 55, No. 25, Dec. 18, 1989, New York, pp. 2588-2590.
S. A. Chalmers et al., "Determination of Tilted Superlattice Structure by Atomic Force Microscopy", Applied Physics Letters, vol. 55, No. 24, Dec. 11, 1989, New York, pp. 2491-2493.
"Compact Interferometric Force Sensor", IBM Technical Disclosure Bulletin, vol. 32, No. 2, Jul. 1, 1989, New York, pp. 416-417.
D. Ruger et al., "Force Microscope Using a Fiber-Optic Displacement Sensor", Review of Scientific Instruments, vol. 59, No. 11, Nov. 1, 1988, New York, pp. 2337-2340.
Y. Martin et al., "Atomic Force Microscope--Force Mapping and Profiling on a Sub 100-.ANG. Scale", J. Appl. Phys., 61(10), May 1987, pp. 4723-4729.
G. Meyer et al., "Novel Optical Approach to Atomic Force Microscopy", Appl. Phys. Lett., 53(12), Sep. 19, 1988, pp. 1045-1047.
S. Alexander et al., "An Atomic-Resolution Atomic-Free Microscope Implemented Using an Optical Lever", J. Appl. Phys., 65(1), Jan. 1, 1989, pp. 164-167.
H. Wickramasinghe, "Scanned-Probe Microscopes", Scientific American, Oct. 1989, pp. 98-105.
A. L. Weisenhorn et al., "Forces in Atomic Force Microscopy in Air and Water", Appl. Phys. Lett., 54(26), Jun. 26, 1989, pp. 2651-2653.
Binnig et al., "Atomic Force Microscope", Phys. Rev. Lett., vol. 56, No. 9, Mar. 1986, pp. 930-933.
IBM TDB, "Lateral Forces and Topography Using the Scanning Tunneling Microscope and Optical Densing of the Tip Position", vol. 32, No. 3A, Aug. 1989, pp. 250-251.
G. M. McClelland et al., "Atomic Force Microscopy, General Principles and New Implementation", IBM Research Report, RJ5368, Nov. 4, 1986, pp. 1-8.

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