Atomic force microscope with probe with improved tip movement

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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Reexamination Certificate

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11455353

ABSTRACT:
An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.

REFERENCES:
patent: 5767514 (1998-06-01), Lloyd
patent: 5801472 (1998-09-01), Wada et al.
patent: 5866807 (1999-02-01), Elings et al.
patent: 5869751 (1999-02-01), Bonin
patent: 6525316 (2003-02-01), Howald
patent: 6578410 (2003-06-01), Israelachvili
patent: 11-014641 (1999-01-01), None
patent: 2001-062791 (2001-03-01), None
patent: 2004-085220 (2004-03-01), None
Xuefeng Wang et al. Scanning Probe Lithography Tips Sith Spring-on Tip Designs: Analysis, Fabrication, and Testing, Applied Physics Letters 87 (2005), doc 054102.

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