Atomic force microscope with light beam emission at predetermine

Details Atomic force microscope with light beam emission at predetermine Atomic force microscope with light beam emission at predetermine

1993-05-04

1995-04-18

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, 250561, H01J 3726

Patent

active

054080940

ABSTRACT:
A cantilever has a probe on one surface of the free end and a reflection surface on the opposite surface thereof. A laser diode is located so as to emit a laser beam to the reflection surface at a predetermined angle. The cantilever is supported at a support member fixed to a cylindrical actuator for scanning the probe across the surface of a sample. Further, there is provided a photodiode having two portions for receiving the laser beam from the reflection surface of the cantilever to detect displacement of the probe on the basis of the incident position of the beam.

REFERENCES:
patent: 5025658 (1991-06-01), Elings et al.
patent: 5157251 (1992-10-01), Albrecht et al.
patent: 5166516 (1992-11-01), Kajimura
patent: 5210410 (1993-05-01), Barrett
patent: 5229606 (1993-07-01), Elings et al.
patent: 5266801 (1993-11-01), Elings et al.
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5294804 (1994-03-01), Kajimura

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