Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1995-10-31
1999-03-16
Metjahic, Safet
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 67, 355 53, 73105, 250234, 250306, 438703, G01B 528
Patent
active
058837051
ABSTRACT:
A cantilever for a scanning probe microscope (SPM) includes a piezoelectric element in a thicker, less flexible section near the fixed base of the cantilever and a piezoresistor in a thinner, more flexible section near the free end of the cantilever. When the SPM operates in the constant force mode, the piezoelectric element is used to control the tip-sample separation. Since the resonant frequency of the piezoelectric element is substantially higher than that of conventional piezoelectric tube scanners, much higher scan rates can be achieved. When the SPM operates in the dynamic or intermittent contact mode, a superimposed AD-DC signal is applied to the piezoelectric element, and the latter is used to vibrate the cantilever as well as to control the tip-sample spacing. In another embodiment the cantilever is supported on a knife edge and vibrates at a third or higher order resonant frequency.
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Manalis Scott
Minne Stephen Charles
Quate Calvin F.
Malley Daniel P.
Metjahic Safet
Steuber David E.
The Board of Trustees of the Leland Stanford Jr. University
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