Scanning-probe techniques or apparatus; applications of scanning – Particular type of scanning probe microscopy or microscope;... – Atomic force microscopy or apparatus therefor – e.g. – afm probes
Reexamination Certificate
2008-03-04
2011-11-29
Maskell, Michael (Department: 2881)
Scanning-probe techniques or apparatus; applications of scanning
Particular type of scanning probe microscopy or microscope;...
Atomic force microscopy or apparatus therefor, e.g., afm probes
C850S001000, C850S006000, C850S008000, C850S011000, C850S037000
Reexamination Certificate
active
08069493
ABSTRACT:
An object of the present invention is to provide an atomic force microscope apparatus allowing tracking errors to be made as close to zero as possible to reduce images obtained through high-speed scanning from being degraded. To accomplish the object of the present invention, the present invention provides an atomic force microscope apparatus imaging a surface topography of a sample in a contact mode, the apparatus including a cantilever having a probe interacting with the sample surface via an atomic force and being subjected to a deflection by the atomic force, laser light provision means for allowing first laser light to enter the cantilever, light detection means, a controller estimating the surface topography of the sample surface, and data storage means for recording the estimated surface topography.
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Fujimoto Hiroshi
Ooshima Takashi
Maskell Michael
Sartori Michael A.
Venable LLP
Yokohama National University
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