Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1995-09-15
1998-09-08
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528
Patent
active
058047085
ABSTRACT:
An atomic force microscope comprises a vibrating device for producing transverse vibrations between a sample and a probe and a vertical load-adjusting device for adjusting the vertical load between the sample and the probe. The sample is vibrated transversely, thus inducing a deflecting vibration on a cantilever. The phase and the amplitude of this deflecting vibration are simultaneously measured. The dependence of the measured value on the vertical load between the sample and the probe is measured. Thus, the friction between the sample and the probe is analyzed.
REFERENCES:
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Mate et al., "Atomic-Scale Friction of a Tungsten Tip on a Graphite Surface", Physical Review Letters, vol. 59, No. 17, 26 Oct. 1987, pp. 1942-1945.
Meyer et al., "Simultaneous Measurement of Lateral and Normal Forces with an Optical-Beam-Deflection Atomic Force Microscope", Appl. Phys. Lett., vol. 57, No. 20, 12 Nov. 1990, pp. 2089-2091.
Radmacher et al., "from Molecules to Cells: Imaging Soft Samples with the Atomic Force Microscope", Science, vol. 257, 25 Sep. 1992, pp. 1900-1905.
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Tomita Eisuke
Yamanaka Kazushi
Agency Industrial Science and Seiko Instruments Inc.
Larkin Daniel S.
Williams Hezron E.
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