Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2006-09-26
2006-09-26
Larkin, Daniel S. (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
Reexamination Certificate
active
07111504
ABSTRACT:
An apparatus includes a sample stage, a cantilever mount, a cantilever-force detector, a cantilever feedback system, and a sample stage feedback system. The sample stage is configured for holding a sample. The cantilever mount is configured for mechanically fixing a mechanical cantilever having a scanning tip. The cantilever-force detector is configured to produce an electrical cantilever-force error signal. The cantilever feedback system is configured to electromechanically drive the mechanical cantilever in a manner responsive to the cantilever-force error signal. The sample stage feedback system is configured to electromechanically displace the sample stage in a manner responsive to the cantilever-force error signal. The cantilever feedback system and the sample stage feedback system are connected to receive the cantilever-force error signal in parallel.
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Blumberg Girsh
Schlockermann Carl Johannes
Larkin Daniel S.
Lucent Technologies - Inc.
McCabe John F.
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