Atomic force microscope

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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C250S306000

Reexamination Certificate

active

06862923

ABSTRACT:
This atomic force microscope has a probe for surface analysis of a sample (E), comprising a support body and an elastically deformable strip linked to the body, the strip being provided with a tip designed to come into contact with the sample (E) to be analysed. The microscope also has a mechanism for relative displacement of the analysis probe with respect to the surface of the sample (E), a detector for determining the position of the strip, and elements for vibrating the strip. These means for vibrating the strip include elements for conduction of electricity along a continuous path forming a loop, an alternating-current generator, and a magnetic-field source designed to set up a magnetic field ({right arrow over (B)}) in the region of the strip of the analysis probe.

REFERENCES:
patent: 5241861 (1993-09-01), Hulsing, II
patent: 5448515 (1995-09-01), Fukami et al.
patent: 5461907 (1995-10-01), Tench et al.
patent: 5513518 (1996-05-01), Lindsay
patent: 5515719 (1996-05-01), Lindsay
patent: 5670712 (1997-09-01), Cleveland et al.
patent: 5753814 (1998-05-01), Han et al.
patent: 5856617 (1999-01-01), Gurney et al.
patent: 5900729 (1999-05-01), Moser et al.
patent: 6064201 (2000-05-01), Cha et al.
patent: 6297502 (2001-10-01), Jarvis et al.
patent: 0 866 307 (1998-09-01), None
patent: 11-108941 (1999-04-01), None
patent: WO 9906793 (1999-02-01), None
Abstract only EP 052155444, Aug. 24, 1993.

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