Atomic force microscope

Details Atomic force microscope Atomic force microscope

1993-08-13

1995-04-18

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, 250307, G01B 528, H01J 3726

Patent

active

054068339

ABSTRACT:
In an atomic force microscope capable of permitting the non-destructive testing of a large sample, a fine motion element is provided for three-dimensional scanning of the sample in order to determine the surface topography thereof. The fine motion element has attached thereto one end of a small spring element, and a detecting tip is connected to the opposite end of the spring element for positioning the end portion of the spring element proximate the sample surface. A displacement detector detects displacement of the spring element by detecting laser light obtained by irradiating a laser beam on the rear surface of the spring element and detecting the displacement using a multi-segment photodetector. Since the fine motion element does not support the sample, the three-dimensional relative scanning of the sample surface by the detecting tip is possible even for large-sized samples.

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patent: 5286977 (1994-02-01), Yokohama et al.
patent: 5289004 (1994-02-01), Okada et al.

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