Atmospheric pressure CVD process for preparing fluorine-doped tu

Coating processes – Electrical product produced – Metallic compound coating

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4271263, 427166, 4272552, 4272553, B05D 512, C23C 1640

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active

053857518

ABSTRACT:
A film of fluorine-doped tungsten oxide is provided on a substrate by reacting together tungsten alkoxide, an oxygen-containing compound, and a fluorine-containing compound.

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American Nuclear Society Proceedings--The Third International Conference on CVD, 1972, pp. 215-241.

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