Atmospheric furnace door counterbalance

Details Atmospheric furnace door counterbalance Atmospheric furnace door counterbalance

1992-05-28

1993-06-08

Favors, Edward G.

Heating

Heating or heat retaining work chamber structure

Door, cover or port

110173R, 432253, F27D 118

Patent

active

052173690

ABSTRACT:
An improved apparatus is described for the closure of the open end of a conventional tube furnace used in the treatment of semiconductor devices manufactured in the integrated circuit industry. The apparatus consists primarily of an adjustable fixed weight on one end of a lever arm and a roller bearing means on the other end, said lever arm being supported by a fulcrum structure which is adjustably attached to the movable track which transports the semiconductor devices into and out of the furnace. The roller bearing end of the lever arm rests with constant pressure against the rear face of the furnace door when the door is closed and held against the opening in the tube furnace. The design eliminates the need for springs and is insensitive to the environment.

REFERENCES:
patent: 4073697 (1978-02-01), Protzl
patent: 4596197 (1986-06-01), Kinzler
patent: 4979897 (1990-12-01), Yates

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