Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2006-04-18
2006-04-18
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
Reexamination Certificate
active
07030993
ABSTRACT:
An interferometer for receiving a measurement beam from a target location on a stage of a semiconductor lithography machine and a reference beam from a reference location separated from the target location by a separation distance. The interferometer has a reference path to be traversed by the reference beam within the interferometer and a measurement path to be traversed by the measurement beam within the interferometer. Both the measurement path and the reference path are at least as long as the separation distance between the reference location and the target location.
REFERENCES:
patent: 4784490 (1988-11-01), Wayne
patent: 4802765 (1989-02-01), Young et al.
patent: 4836678 (1989-06-01), Okaji
patent: 4881815 (1989-11-01), Sommargren
patent: 4881816 (1989-11-01), Zanoni
patent: 4883357 (1989-11-01), Zanoni et al.
patent: 5056921 (1991-10-01), Chaney
patent: 5064289 (1991-11-01), Bockman
patent: 5200797 (1993-04-01), Tank et al.
patent: 5471304 (1995-11-01), Wang
patent: 5483343 (1996-01-01), Iwamoto et al.
patent: 5675412 (1997-10-01), Solomon
patent: 5715057 (1998-02-01), Bechstein et al.
patent: 5757160 (1998-05-01), Kreuzer
patent: 5757491 (1998-05-01), Cai et al.
patent: 5801832 (1998-09-01), Van Den Brink
patent: 6020964 (2000-02-01), Loopstra et al.
patent: 6046792 (2000-04-01), Van Der Werf et al.
patent: 6208424 (2001-03-01), de Groot
patent: 6252667 (2001-06-01), Hill et al.
patent: 6271923 (2001-08-01), Hill
patent: 6313918 (2001-11-01), Hill
patent: 6552804 (2003-04-01), Hill
patent: 6762845 (2004-07-01), Hill
patent: 2002/0001087 (2002-01-01), Hill
patent: 2003/0053079 (2003-03-01), Hill
patent: 2004/0047027 (2004-03-01), Carlson
“Documentation Laser Interferometry in Length Measurement Techniques”, Press of the Association of German Engineers, pp. 47-50 (Mar. 12 & 13, 1985), German document with English translation and with Affidavit of Accuracy.
“Documentation Precision of Laser Interferometer Systems”, Press of the Association of German Engineers, pp. 97-98 (Apr. 1989), German document with English translation and with Affidavit of Accuracy.
Turner Samuel A.
Zygo Corporation
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