Asymmetrical thermal actuation in a microactuator

Details Asymmetrical thermal actuation in a microactuator Asymmetrical thermal actuation in a microactuator

1996-04-30

1999-09-21

Chambers, A. Michael

Fluid handling

Processes

Affecting flow by the addition of material or energy

251 11, 25112901, F16K 3104

Patent

active

059540796

ABSTRACT:
A microminiature valve having an actuator member that includes a central body suspended on radially spaced legs, with each leg having first and second layers of materials having substantially different coefficients of thermal expansion. The legs include heating elements and are fixed at one end to allow radial compliance as selected heating of the legs causes flexure. An actuator member includes a boss having an actuator face. A seat substrate having a flow via defined by a valve seat is aligned with the actuator face. Asymmetrical thermal actuation of the actuator member moves the actuator face from the valve seat in a rotational displacement relative to the flow orifice, thereby offering improved control of the fluid flow through the orifice.

REFERENCES:
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5058856 (1991-10-01), Gordon et al.
patent: 5069419 (1991-12-01), Jerman
patent: 5333831 (1994-08-01), Barth et al.

Affiliated with

Also associated with

Rating

Asymmetrical thermal actuation in a microactuator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Asymmetrical thermal actuation in a microactuator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Asymmetrical thermal actuation in a microactuator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-71947