Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1995-03-22
1997-01-21
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356346, G01B 902
Patent
active
055964095
ABSTRACT:
The present invention relates to an apparatus and method for measuring physical properties of an object, such as thickness, group index of refraction, and distance to a surface. The apparatus includes a non-coherent light interferometer (53) and a coherent light interferometer (55) in association so as to share a variable optical path delay element (54). Thickness measurements can be made, for example, of solids, liquids, liquids moving along a horizontal plane, or liquids flowing down a plane. Thickness measurements of multiple layers can be made.
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Gross Stanley
Marcus Michael A.
Wideman David C.
Eastman Kodak Company
Merlino Amanda
Parulski Susan L.
Turner Samuel A.
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